Browsing by Author Park, C.-Y.
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) | Supervisor(s) |
|---|---|---|---|
| 2020 | Nanocatalyst-induced hydroxyl radical ( OH) slurry for tungsten CMP for next-generation semiconductor processing | Poddar, M.K.; Ryu, H.-Y.; Yerriboina, N.P.; Jeong, Y.-A.; Lee, J.-H.; Kim, T.-G.; Kim, J.-H.; Park, J.-D.; Lee, M.-G.; Park, C.-Y.; Han, S.-J.; Choi, J.-G.; Park, J.-G. | - |